From femto- + machine, by analogy with micromachine, nanomachine, and so on.
"femtomachine." YourDictionary, n.d. Web. 07 December 2018. <https://www.yourdictionary.com/femtomachine>.
femtomachine. (n.d.). Retrieved December 07th, 2018, from https://www.yourdictionary.com/femtomachine
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