Mems definition

mĕmz
Microelectro-mechanical systems are tiny sensors and other devices that have small moving parts. Such devices are commonly found in consumer electronics products such as DVD players, cell phones, and hand-held computers, expanding from their early markets in industrial and military applications.
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Tiny electromechanical systems on a silicon chip. MEMS comprise integrated mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technologies, including the micromachining of the mechanical elements. MEMS are employed in optical projectors as well as in purely optical switches used in fiber optics transmission systems (FOTS), and actually are more along the lines of optical cross-connects. As purely optical devices, they do not require that the incoming optical signal be converted to an electrical signal for processing and then be reconverted to an optical signal. In other words, MEMS are optical-optical-optical (OOO), rather than optical-electrical-optical (OEO). See also cross-connect, FOTS, and switch.
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Plural form of mem.
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A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
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Devices, machines, or systems fabricated using this technology.
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Origin of mems

  • m(icro)e(lectro)m(echanical) s(ystems)

    From American Heritage Dictionary of the English Language, 5th Edition