MEMS Definition

mĕmz
noun
A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
American Heritage
Devices, machines, or systems fabricated using this technology.
American Heritage

Plural form of mem.

Wiktionary

Origin of MEMS

  • m(icro)e(lectro)m(echanical) s(ystems)

    From American Heritage Dictionary of the English Language, 5th Edition

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