A method for inscribing a pattern on a wafer by shooting hot ions through a mask to evaporate the silicon dioxide insulation layer. Dry plasma etching replaces the wet processing method that uses film and acid for developing the pattern.
"dry plasma etching." YourDictionary, n.d. Web. 11 November 2018. <https://www.yourdictionary.com/dry-plasma-etching>.
dry plasma etching. (n.d.). Retrieved November 11th, 2018, from https://www.yourdictionary.com/dry-plasma-etching
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